Haruo Ozawa
4Patents
4h-index
9Co-inventors
43Inventor score
Filing activity: Nov 28, 1984 → Oct 25, 1999
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US4939630A | Illumination optical apparatus | Physics | 87 | Expired |
| US6341006B1 | Projection exposure apparatus | Emerging Cross-Sectional Technologies | 48 | Expired |
| US4737920A | Method and apparatus for correcting rotational errors during inspection of reticles and masks | Physics | 39 | Expired |
| US5207505A | Illumination light source device | Mechanical Engineering; Lighting; Heating | 24 | Expired |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.