Inventor · Baoshan, TW

Hendrix Jeng

1Patents
1h-index
2Co-inventors
22Inventor score

Filing activity: Jan 12, 2002 → Jan 12, 2002

Most-cited inventions

PatentTitleAreaCited byStatus
US6778266B2 Semiconductor wafer tilt monitoring on semiconductor fabrication equipment plate Physics 2 Expired

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.