Hideaki Gotou
3Patents
3h-index
11Co-inventors
40Inventor score
Filing activity: Oct 28, 1994 → Aug 5, 1996
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US5565034A | Apparatus for processing substrates having a film formed on a surface of the substrate | Emerging Cross-Sectional Technologies | 133 | Expired |
| US5725664A | Semiconductor wafer processing apparatus including localized humidification between coating and heat treatment sections | Emerging Cross-Sectional Technologies | 54 | Expired |
| US6054181A | Method of substrate processing to form a film on multiple target objects | Emerging Cross-Sectional Technologies | 50 | Expired |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.