Hideaki Udou
2Patents
0h-index
10Co-inventors
31Inventor score
Filing activity: Mar 30, 2016 → Jun 22, 2022
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US12300518B2 | Substrate processing apparatus and substrate processing method having enhanced configuration of replenishing processing liquid | Performing Operations; Transporting | 0 | Active |
| US9865452B2 | Substrate processing method and substrate processing apparatus | Electricity | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.