Hideki Koitabashi
5Patents
5h-index
8Co-inventors
45Inventor score
Filing activity: Nov 7, 1994 → Oct 14, 1998
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US5500736A | Method of detecting positions | Physics | 230 | Expired |
| US5999244A | Projection exposure apparatus, method for correcting positional discrepancy of projected image, and method for determining image formation characteristic of projection optical system | Physics | 18 | Expired |
| US5640243A | Position detection method | Physics | 15 | Expired |
| US5849441A | Alignment method utilizing plurality of marks, discriminable from each other, capable of effecting alignment individually | Emerging Cross-Sectional Technologies | 10 | Expired |
| US6141082A | Alignment method, exposure method, and exposure apparatus | Emerging Cross-Sectional Technologies | 8 | Expired |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.