Position detection method
US5640243A · kind A · utility
15Cited by
2References
6Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Apr 26, 1995 |
| Grant date | Jun 17, 1997 |
| Priority date | — |
| Expiry date | Apr 26, 2015 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F9/70
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
An image in which a feature corresponding to a reference mark formed at a predetermined position in an exposure apparatus is formed at a predetermined position in an arbitrary area is stored as a reference image, and a reference image including an image corresponding to the reference mark is detected from an image to be processed obtained by picking up an image near the reference mark to detect the position of the reference mark in the image to be processed, thus enabling detection of the positional relationship between a reference in the exposure apparatus and substrate alignment means.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.