Hideya Tanaka
7Patents
5h-index
11Co-inventors
60Inventor score
Filing activity: Jun 6, 1979 → Oct 3, 2000
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US5689749A | Apparatus for developing a resist-coated substrate | Performing Operations; Transporting | 45 | Expired |
| US6059891A | Apparatus and method for washing substrate | Emerging Cross-Sectional Technologies | 25 | Expired |
| US5826130A | Apparatus and method for developing resist coated on substrate | Performing Operations; Transporting | 24 | Expired |
| US6158075A | Apparatus and method for washing substrate | Emerging Cross-Sectional Technologies | 18 | Expired |
| US5679226A | Oxygen sensor | Physics | 15 | Expired |
| US6379469B1 | Apparatus and method for washing substrate | Emerging Cross-Sectional Technologies | 4 | Expired |
| US4272352A | Electrode compartment | Chemistry; Metallurgy | 2 | Expired |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.