Hiromitsu Kanbara
3Patents
3h-index
12Co-inventors
43Inventor score
Filing activity: Mar 3, 1995 → Nov 6, 2001
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US5556500A | Plasma etching apparatus | Emerging Cross-Sectional Technologies | 92 | Expired |
| US6553277B1 | Method and apparatus for vacuum treatment | Electricity | 40 | Expired |
| US5785877A | Dry etching method | Emerging Cross-Sectional Technologies | 19 | Expired |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.