Hiroyuki Shichida
18Patents
12h-index
15Co-inventors
71Inventor score
Filing activity: Nov 18, 1993 → Aug 25, 2005
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| USD557226S1 | Electrode cover for a plasma processing apparatus | General | 597 | Expired |
| US5458687A | Method of and apparatus for securing and cooling/heating a wafer | Electricity | 47 | Expired |
| US6048434A | Substrate holding system including an electrostatic chuck | Emerging Cross-Sectional Technologies | 47 | Expired |
| US5792304A | Method of holding substrate and substrate holding system | Emerging Cross-Sectional Technologies | 40 | Expired |
| US5906684A | Method of holding substrate and substrate holding system | Emerging Cross-Sectional Technologies | 37 | Expired |
| US6524428B2 | Method of holding substrate and substrate holding system | Emerging Cross-Sectional Technologies | 18 | Expired |
| US5961774A | Method of holding substrate and substrate holding system | Emerging Cross-Sectional Technologies | 18 | Expired |
| US5580420A | Plasma generating method and apparatus and plasma processing method and apparatus | Electricity | 17 | Expired |
| US6217705A | Method of holding substrate and substrate holding system | Emerging Cross-Sectional Technologies | 17 | Expired |
| US6645871B2 | Method of holding substrate and substrate holding system | Emerging Cross-Sectional Technologies | 15 | Expired |
| US5985035A | Method of holding substrate and substrate holding system | Emerging Cross-Sectional Technologies | 14 | Expired |
| US6221201A | Method of holding substrate and substrate holding system | Emerging Cross-Sectional Technologies | 13 | Expired |
| US6336991B1 | Method of holding substrate and substrate holding system | Emerging Cross-Sectional Technologies | 12 | Expired |
| US6544379B2 | Method of holding substrate and substrate holding system | Emerging Cross-Sectional Technologies | 6 | Expired |
| US6676805B2 | Method of holding substrate and substrate holding system | Emerging Cross-Sectional Technologies | 5 | Expired |
| US6899789B2 | Method of holding substrate and substrate holding system | Emerging Cross-Sectional Technologies | 5 | Expired |
| US6610170B2 | Method of holding substrate and substrate holding system | Emerging Cross-Sectional Technologies | 4 | Expired |
| US6610171B2 | Method of holding substrate and substrate holding system | Emerging Cross-Sectional Technologies | 3 | Expired |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.