Electrode cover for a plasma processing apparatus
USD557226S1 · kind S1 · design
597Cited by
13References
1Claims
0Family size
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Key dates
| Filing date | Aug 25, 2005 |
| Grant date | Dec 11, 2007 |
| Priority date | — |
| Expiry date | Dec 11, 2021 |
Classification
- Technology area (CPC —)General
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.