Hsing Chign Ma
1Patents
1h-index
2Co-inventors
22Inventor score
Filing activity: Oct 3, 2005 → Oct 3, 2005
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US7504185B2 | Method for depositing multi-layer film of mask blank for EUV lithography and method for producing mask blank for EUV lithography | Physics | 4 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.