Hubertus Antonius Geraets
5Patents
2h-index
14Co-inventors
40Inventor score
Filing activity: Nov 19, 2008 → Apr 24, 2015
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US8908148B2 | Calibration method and inspection apparatus | Physics | 7 | Active |
| US9983489B2 | Method for compensating for an exposure error, a device manufacturing method, a substrate table, a lithographic apparatus, a control system, a method for measuring reflectivity and a method for measuring a dose of EUV radiation | Physics | 3 | Active |
| US8289516B2 | Method of measuring focus of a lithographic projection apparatus | Physics | 2 | Active |
| US9519224B2 | Lithographic apparatus and method | Physics | 2 | Active |
| US8436998B2 | Method of measuring focus of a lithographic projection apparatus | Physics | 1 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.