Hung-Chia Su
2Patents
0h-index
2Co-inventors
18Inventor score
Filing activity: Sep 24, 2020 → Jun 28, 2021
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US11320381B2 | Deterioration detecting system and method for semiconductor process kits | Emerging Cross-Sectional Technologies | 0 | Active |
| US12055498B2 | Data processing method and system for detection of deterioration of semiconductor process kits | Electricity | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.