Hung-Hsin Liang
5Patents
1h-index
17Co-inventors
44Inventor score
Filing activity: Jun 8, 2002 → Oct 23, 2015
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US6776850B2 | Preventative maintenance aided tool for CVD chamber | Chemistry; Metallurgy | 11 | Expired |
| US9406525B2 | Method for semiconductor manufacturing | Electricity | 0 | Active |
| US9202809B2 | Semiconductor device and method for manufacturing thereof | Electricity | 0 | Active |
| US9508815B2 | Semiconductor device and method for manufacturing thereof | Electricity | 0 | Active |
| US9659794B2 | Particle improvement for single wafer apparatus | Electricity | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.