Il Jun Jeon
2Patents
1h-index
10Co-inventors
34Inventor score
Filing activity: Jul 24, 2018 → Nov 28, 2021
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US11098406B2 | Substrate support unit and deposition apparatus including the same | Electricity | 2 | Active |
| US12290778B2 | Scrubber, ALD process system including the scrubber and method for fabricating semiconductor device using the scrubber | Performing Operations; Transporting | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.