Ilya Chizhov
2Patents
1h-index
1Co-inventors
27Inventor score
Filing activity: Jan 11, 2002 → Apr 28, 2003
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US6747746B2 | System and method for finding the center of rotation of an R-theta stage | Physics | 12 | Expired |
| US7030984B2 | Fast wafer positioning method for optical metrology | Physics | 1 | Expired |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.