Inventor · Busan, KR

Jae-Mok Jung

3Patents
3h-index
9Co-inventors
39Inventor score

Filing activity: May 23, 2007 → Dec 15, 2011

Most-cited inventions

PatentTitleAreaCited byStatus
US8084367B2 Etching, cleaning and drying methods using supercritical fluid and chamber systems using these methods Emerging Cross-Sectional Technologies 7 Active
US8790470B2 Etching, cleaning and drying methods using supercritical fluid and chamber systems using these methods Emerging Cross-Sectional Technologies 6 Active
US8585917B2 Etching, cleaning and drying methods using supercritical fluid and chamber systems using these methods Emerging Cross-Sectional Technologies 4 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.