Inventor · Portola Valley, CA, US

James E. Herlinger

3Patents
3h-index
7Co-inventors
43Inventor score

Filing activity: May 16, 1986 → Nov 6, 1998

Most-cited inventions

PatentTitleAreaCited byStatus
US4770590A Method and apparatus for transferring wafers between cassettes and a boat Emerging Cross-Sectional Technologies 518 Expired
US5833753A Reactor having an array of heating filaments and a filament force regulator Chemistry; Metallurgy 14 Expired
US5997650A Reactor having an array of heating filaments and a filament force regulator Chemistry; Metallurgy 13 Expired

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.