Reactor having an array of heating filaments and a filament force regulator
US5833753A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Dec 20, 1995 |
| Grant date | Nov 10, 1998 |
| Priority date | — |
| Expiry date | Dec 20, 2015 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC23C16/271
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
An apparatus for adjusting the tension on a heating filament in a reactor used in carbon deposition on a substrate via chemical-vapor deposition is disclosed, as is a method for preventing breakage of the filaments during operation. The apparatus comprises a force regulator attached to an array of heating filaments. Preferably, the force regulator is adjustable and is adjusted prior to reactor operation and/or periodically or continuously as the filaments lengthen due to carburization in the carbon-vapor environment of the reactor. The adjustable force regulator attached to an array of filaments enables effective regulation of the force on a filament during reactor operation and provides an easily-maintained reactor with quick turn-around time between cycles of use.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.