Inventor · San Jose, CA, US

James Jin-Long Chen

6Patents
6h-index
18Co-inventors
49Inventor score

Filing activity: Jul 11, 1997 → Dec 19, 2000

Most-cited inventions

PatentTitleAreaCited byStatus
US6364954B2 High temperature chemical vapor deposition chamber Chemistry; Metallurgy 275 Expired
US6110322A Prevention of ground fault interrupts in a semiconductor processing system Electricity 56 Expired
US6206971A Integrated temperature controlled exhaust and cold trap assembly Emerging Cross-Sectional Technologies 51 Expired
US6176930A Apparatus and method for controlling a flow of process material to a deposition chamber Chemistry; Metallurgy 24 Expired
US6086676A Programmable electrical interlock system for a vacuum processing system Chemistry; Metallurgy 8 Expired
US6517592B2 Cold trap assembly Emerging Cross-Sectional Technologies 7 Expired

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.