Inventor · Marly-le-Roi, FR

Jean-Philippe Piel

3Patents
1h-index
5Co-inventors
33Inventor score

Filing activity: Jan 27, 1998 → Sep 11, 2006

Most-cited inventions

PatentTitleAreaCited byStatus
US5991037A High spatial resolution ellipsometry device Physics 6 Expired
US7714992B2 Equipment and method for monitoring an immersion lithography device Physics 0 Active
US7230701B2 Compact spectroscopic ellipsometer Physics 0 Expired

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.