Inventor · Dresden, DE

Jens Uwe Bruch

2Patents
1h-index
6Co-inventors
27Inventor score

Filing activity: Sep 24, 2004 → Sep 24, 2004

Most-cited inventions

PatentTitleAreaCited byStatus
US7310129B2 Method for carrying out a double or multiple exposure Physics 2 Expired
US7186484B2 Method for determining the relative positional accuracy of two structure elements on a wafer Electricity 1 Expired

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.