Inventor · Ibaraki, JP

Jiro Yokota

3Patents
2h-index
7Co-inventors
33Inventor score

Filing activity: Aug 31, 2017 → Jan 13, 2022

Most-cited inventions

PatentTitleAreaCited byStatus
US11075084B2 Chemistries for etching multi-stacked layers Electricity 4 Active
US10529581B2 SiN selective etch to SiO2 with non-plasma dry process for 3D NAND device applications Electricity 3 Active
US12106940B2 Systems and methods for storage and supply of F3NO-free FNO gases and F3NO-free FNO gas mixtures for semiconductor processes Electricity 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.