Jiro Yokota
3Patents
2h-index
7Co-inventors
33Inventor score
Filing activity: Aug 31, 2017 → Jan 13, 2022
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US11075084B2 | Chemistries for etching multi-stacked layers | Electricity | 4 | Active |
| US10529581B2 | SiN selective etch to SiO2 with non-plasma dry process for 3D NAND device applications | Electricity | 3 | Active |
| US12106940B2 | Systems and methods for storage and supply of F3NO-free FNO gases and F3NO-free FNO gas mixtures for semiconductor processes | Electricity | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.