Inventor · Ottobrunn, DE

Jochen Hanebeck

2Patents
2h-index
5Co-inventors
30Inventor score

Filing activity: Sep 29, 1997 → Jan 11, 2001

Most-cited inventions

PatentTitleAreaCited byStatus
US6635567B2 Method of producing alignment marks Electricity 8 Expired
US5866485A Techniques for etching a silicon dioxide-containing layer Electricity 5 Expired

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.