Jochen Klais
1Patents
1h-index
9Co-inventors
25Inventor score
Filing activity: May 1, 2007 → May 1, 2007
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US7550396B2 | Method for reducing resist poisoning during patterning of silicon nitride layers in a semiconductor device | Electricity | 489 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.