Inventor · Freital, DE

Joerg Pollack

1Patents
0h-index
2Co-inventors
16Inventor score

Filing activity: Sep 26, 2018 → Sep 26, 2018

Most-cited inventions

PatentTitleAreaCited byStatus
US11244845B2 Vacuum chamber arrangement and method for processing a substrate Electricity 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.