John Lang
3Patents
3h-index
4Co-inventors
36Inventor score
Filing activity: Jun 30, 1999 → Jan 30, 2002
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US6696366B1 | Technique for etching a low capacitance dielectric layer | Electricity | 56 | Expired |
| US6383931B1 | Convertible hot edge ring to improve low-K dielectric etch | Electricity | 33 | Expired |
| US6653734B2 | Convertible hot edge ring to improve low-K dielectric etch | Electricity | 21 | Expired |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.