Jon MacErnie
7Patents
4h-index
15Co-inventors
46Inventor score
Filing activity: Nov 9, 1994 → May 17, 2000
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US5562947A | Method and apparatus for isolating a susceptor heating element from a chemical vapor deposition environment | Chemistry; Metallurgy | 412 | Expired |
| US6213853A | Integral machine for polishing, cleaning, rinsing and drying workpieces | Performing Operations; Transporting | 30 | Expired |
| US6368183B1 | Wafer cleaning apparatus and associated wafer processing methods | Emerging Cross-Sectional Technologies | 17 | Expired |
| US6350177B1 | Combined CMP and wafer cleaning apparatus and associated methods | Performing Operations; Transporting | 7 | Expired |
| US5897380A | Method for isolating a susceptor heating element from a chemical vapor deposition environment | Chemistry; Metallurgy | 4 | Expired |
| US6364745B1 | Mapping system for semiconductor wafer cassettes | Performing Operations; Transporting | 4 | Expired |
| US6125861A | Post-CMP wet-HF cleaning station | Emerging Cross-Sectional Technologies | 4 | Expired |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.