Inventor · Suwon-si, KR

Jongha YUN

1Patents
0h-index
4Co-inventors
19Inventor score

Filing activity: Jan 9, 2023 → Jan 9, 2023

Most-cited inventions

PatentTitleAreaCited byStatus
US12122702B2 Ultrapure water supply apparatus, substrate processing system including the same, and substrate processing method using the same Electricity 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.