Jonghwi Seo
3Patents
0h-index
11Co-inventors
28Inventor score
Filing activity: Apr 10, 2020 → Apr 18, 2022
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US12217984B2 | Wafer processing apparatus including EFEM and method of processing wafer | Electricity | 0 | Active |
| US11804393B2 | Wafer processing apparatus including equipment front end module (EFEM) and wafer processing method using the same | Electricity | 0 | Active |
| US11462410B2 | Semiconductor manufacturing apparatus including a beam shaper for shaping a laser beam | Performing Operations; Transporting | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.