Joseph P. Kirk
10Patents
7h-index
11Co-inventors
63Inventor score
Filing activity: Dec 4, 1978 → Dec 28, 2001
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US5663785A | Diffraction pupil filler modified illuminator for annular pupil fills | Physics | 61 | Expired |
| US4293224A | Optical system and technique for unambiguous film thickness monitoring | Physics | 24 | Expired |
| US6842237B2 | Phase shifted test pattern for monitoring focus and aberrations in optical projection systems | Physics | 18 | Expired |
| US6091486A | Blazed grating measurements of lithographic lens aberrations | Physics | 17 | Expired |
| US5808731A | System and method for visually determining the performance of a photolithography system | Physics | 12 | Expired |
| UST102104I4 | Scanning optical system adapted for linewidth measurement in semiconductor devices | General | 11 | Expired |
| US6048651A | Fresnel zone mask for pupilgram | Physics | 11 | Expired |
| US4260259A | Metal etch rate analyzer | Physics | 3 | Expired |
| US6606151B2 | Grating patterns and method for determination of azimuthal and radial aberration | Physics | 2 | Expired |
| US5898498A | Point interferometer to measure phase shift in reticles | Physics | 2 | Expired |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.