Scanning optical system adapted for linewidth measurement in semiconductor devices
UST102104I4 · kind I4 · defensive publication
11Cited by
0References
1Claims
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Key dates
| Filing date | Jul 30, 1980 |
| Grant date | Aug 3, 1982 |
| Priority date | — |
| Expiry date | Jul 30, 2000 |
Classification
- Technology area (CPC —)General
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.