Inventor · Rabenau, DE

Karsten Peukert

1Patents
1h-index
Co-inventors
19Inventor score

Filing activity: Jun 25, 2004 → Jun 25, 2004

Most-cited inventions

PatentTitleAreaCited byStatus
US7274867B2 System and method for determining the temperature of a semiconductor wafer Physics 455 Expired

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.