Kazuya Iwanaga
2Patents
1h-index
8Co-inventors
30Inventor score
Filing activity: Nov 24, 2015 → Jul 25, 2019
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US11469116B2 | Substrate processing apparatus and substrate processing method | Electricity | 2 | Active |
| US10713772B2 | Measurement processing device, substrate processing system, measurement jig, measurement processing method, and storage medium | Physics | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.