Keishi Shionaga
3Patents
1h-index
11Co-inventors
41Inventor score
Filing activity: Mar 23, 2009 → May 23, 2022
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US9857124B2 | Clamp apparatus, substrate carry-in/out apparatus using the same, and substrate processing apparatus | Mechanical Engineering; Lighting; Heating | 3 | Active |
| US12428242B2 | Information processing apparatus, transfer position correction method, and substrate processing apparatus | Physics | 0 | Active |
| US8216378B2 | Reaction tube and heat processing apparatus for a semiconductor process | Electricity | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.