Inventor · Yamanashi, JP

Keishi Shionaga

3Patents
1h-index
11Co-inventors
41Inventor score

Filing activity: Mar 23, 2009 → May 23, 2022

Most-cited inventions

PatentTitleAreaCited byStatus
US9857124B2 Clamp apparatus, substrate carry-in/out apparatus using the same, and substrate processing apparatus Mechanical Engineering; Lighting; Heating 3 Active
US12428242B2 Information processing apparatus, transfer position correction method, and substrate processing apparatus Physics 0 Active
US8216378B2 Reaction tube and heat processing apparatus for a semiconductor process Electricity 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.