Clamp apparatus, substrate carry-in/out apparatus using the same, and substrate processing apparatus
US9857124B2 · kind B2 · utility
3Cited by
16References
16Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Mar 15, 2016 |
| Grant date | Jan 2, 2018 |
| Priority date | — |
| Expiry date | Mar 15, 2036 |
Classification
- Technology area (CPC F)Mechanical Engineering; Lighting; Heating
- CPC primaryF27D2003/0046
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
The clamp apparatus of the present disclosure includes a clamp member configured to contact a substrate accommodating container from an upper side and fix the substrate accommodating container to a predetermined position when a cover provided on a front surface of the substrate accommodating container is opened/closed, a driving mechanism configured to drive the clamp member; a casing configured to cover the driving mechanism, a suction port configured to communicate with the casing, an exhaust chamber provided near the casing, and a fan provided inside the exhaust chamber.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.