Inventor · Göttingen, DE

Klaus Mann

3Patents
3h-index
8Co-inventors
36Inventor score

Filing activity: Sep 28, 1998 → Feb 9, 2001

Most-cited inventions

PatentTitleAreaCited byStatus
US6014206A Stabilization of angular and lateral laser beam position Electricity 52 Expired
US6389045B1 Optical pulse stretching and smoothing for ArF and F2 lithography excimer lasers Emerging Cross-Sectional Technologies 36 Expired
US6624424B2 VUV laser beam characterization system Emerging Cross-Sectional Technologies 11 Expired

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.