Kuno Backhaus
3Patents
2h-index
7Co-inventors
30Inventor score
Filing activity: Nov 6, 2000 → Aug 21, 2002
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US6456373B1 | Method and apparatus for monitoring the light emitted from an illumination apparatus for an optical measuring instrument | Electricity | 39 | Expired |
| US6618154B2 | Optical measurement arrangement, in particular for layer thickness measurement | Physics | 3 | Expired |
| US7084965B2 | Arrangement and method for inspecting unpatterned wafers | Physics | 1 | Expired |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.