Inventor · Campbell, CA, US

Kuo-Wei Liu

11Patents
11h-index
15Co-inventors
61Inventor score

Filing activity: Nov 4, 1998 → Mar 22, 2005

Most-cited inventions

PatentTitleAreaCited byStatus
US6303523A Plasma processes for depositing low dielectric constant films Emerging Cross-Sectional Technologies 649 Expired
US6348725B1 Plasma processes for depositing low dielectric constant films Emerging Cross-Sectional Technologies 94 Expired
US6660656B2 Plasma processes for depositing low dielectric constant films Emerging Cross-Sectional Technologies 91 Expired
US6562690B1 Plasma processes for depositing low dielectric constant films Emerging Cross-Sectional Technologies 58 Expired
US6541282B1 Plasma processes for depositing low dielectric constant films Emerging Cross-Sectional Technologies 48 Expired
US6596655B1 Plasma processes for depositing low dielectric constant films Emerging Cross-Sectional Technologies 43 Expired
US6734115B2 Plasma processes for depositing low dielectric constant films Emerging Cross-Sectional Technologies 35 Expired
US6632735B2 Method of depositing low dielectric constant carbon doped silicon oxide Electricity 28 Expired
US6930061B2 Plasma processes for depositing low dielectric constant films Emerging Cross-Sectional Technologies 22 Expired
US6869896B2 Plasma processes for depositing low dielectric constant films Emerging Cross-Sectional Technologies 21 Expired
US7560377B2 Plasma processes for depositing low dielectric constant films Emerging Cross-Sectional Technologies 16 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.