Lennert Schwart
1Patents
1h-index
2Co-inventors
22Inventor score
Filing activity: Sep 25, 2018 → Sep 25, 2018
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US10937681B2 | Wafer support system, wafer support device, system comprising a wafer and a wafer support device as well as mask aligner | Electricity | 1 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.