Inventor · Concord, MA, US

Leonard Lublin

4Patents
4h-index
24Co-inventors
43Inventor score

Filing activity: Mar 9, 2001 → Mar 8, 2003

Most-cited inventions

PatentTitleAreaCited byStatus
US6563128B2 Base stabilization system Mechanical Engineering; Lighting; Heating 43 Expired
US6904073B2 High power deep ultraviolet laser with long life optics Electricity 37 Expired
US6704339B2 Lithography laser with beam delivery and beam pointing control Electricity 28 Expired
US6791098B2 Multi-input, multi-output motion control for lithography system Electricity 4 Expired

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.