Multi-input, multi-output motion control for lithography system
US6791098B2 · kind B2 · utility
4Cited by
58References
10Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Mar 9, 2001 |
| Grant date | Sep 14, 2004 |
| Priority date | — |
| Expiry date | Mar 9, 2021 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH04R17/08
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A multi-input, multi-output vibration control system for a lithography system. The system provides an actuator, and a sensor useful for controlling vibrations in systems for fabricating electronics equipment. The system includes a processor programmed with a multi-input, multi-output control technique such as a linear quadratic Gaussian, H-infinity or mu synthesis. The actuator may comprise one or more plates or elements of electroactive material bonded to an electroded sheet.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.