Lihui Wen
2Patents
1h-index
11Co-inventors
37Inventor score
Filing activity: Nov 23, 2011 → Apr 2, 2019
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US10287686B2 | Hot plate and substrate processing equipment using the same | Electricity | 1 | Active |
| US11107706B2 | Gas phase etching device and gas phase etching apparatus | Electricity | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.