Inventor · Yokohama, JP

Linan Ji

9Patents
3h-index
17Co-inventors
46Inventor score

Filing activity: Oct 24, 2008 → Jan 29, 2015

Most-cited inventions

PatentTitleAreaCited byStatus
US7749909B2 Method of treating a semiconductor substrate Emerging Cross-Sectional Technologies 39 Active
US7838425B2 Method of treating surface of semiconductor substrate Emerging Cross-Sectional Technologies 18 Active
US7985683B2 Method of treating a semiconductor substrate Emerging Cross-Sectional Technologies 9 Active
US9583330B2 Supercritical drying method for semiconductor substrate and supercritical drying apparatus Mechanical Engineering; Lighting; Heating 2 Active
US8567420B2 Cleaning apparatus for semiconductor wafer Electricity 1 Active
US9570286B2 Supercritical drying method for semiconductor substrate Mechanical Engineering; Lighting; Heating 1 Active
US8771429B2 Supercritical drying method for semiconductor substrate and supercritical drying apparatus Mechanical Engineering; Lighting; Heating 1 Active
US8950082B2 Supercritical drying method for semiconductor substrate Mechanical Engineering; Lighting; Heating 1 Active
US8961696B2 Method and device for cleaning semiconductor substrate Electricity 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.