Lo-Soun Su
1Patents
1h-index
2Co-inventors
22Inventor score
Filing activity: Jul 30, 1980 → Jul 30, 1980
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| UST102104I4 | Scanning optical system adapted for linewidth measurement in semiconductor devices | General | 11 | Expired |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.