Inventor · Nagano, JP

Makoto Osuga

2Patents
2h-index
4Co-inventors
37Inventor score

Filing activity: Jul 1, 1981 → May 19, 1997

Most-cited inventions

PatentTitleAreaCited byStatus
US4388140A Apparatus for wet treatment of wafer materials Electricity 20 Expired
US6080641A Method of manufacturing semiconductor wafer Emerging Cross-Sectional Technologies 4 Expired

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.