Marcus Zehetbauer
1Patents
1h-index
5Co-inventors
25Inventor score
Filing activity: Jan 3, 2001 → Jan 3, 2001
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US6936825B2 | Process for the decontamination of microlithographic projection exposure devices | Physics | 5 | Expired |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.