Mark Markovsky
2Patents
2h-index
12Co-inventors
37Inventor score
Filing activity: Apr 22, 2013 → Sep 20, 2017
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US8937800B2 | Electrostatic chuck with advanced RF and temperature uniformity | Electricity | 289 | Active |
| US10904996B2 | Substrate support with electrically floating power supply | Electricity | 38 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.