Inventor · Oosterdijk, TX, US

Mark S. Wanta

2Patents
2h-index
5Co-inventors
33Inventor score

Filing activity: Apr 14, 1987 → Nov 14, 1995

Most-cited inventions

PatentTitleAreaCited byStatus
US5621813A Pattern recognition alignment system Physics 39 Expired
US4880309A Dark field target design system for alignment of semiconductor wafers Physics 14 Expired

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.