Mark S. Wanta
2Patents
2h-index
5Co-inventors
33Inventor score
Filing activity: Apr 14, 1987 → Nov 14, 1995
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US5621813A | Pattern recognition alignment system | Physics | 39 | Expired |
| US4880309A | Dark field target design system for alignment of semiconductor wafers | Physics | 14 | Expired |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.