Inventor · Meiningen, DE

Markus Renno

2Patents
2h-index
9Co-inventors
27Inventor score

Filing activity: Sep 5, 2003 → Apr 16, 2004

Most-cited inventions

PatentTitleAreaCited byStatus
US7029803B2 Attenuating phase shift mask blank and photomask Physics 40 Expired
US7517617B2 Mask blank for use in EUV lithography and method for its production Physics 6 Expired

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.